Preferential sputtering and oxidation of Nb-Ta single crystals studied by low-energy ion scattering

Author: Semenov V.N.   Glebovsky V.G.   Brongersma H.H.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.47, Iss.10, 1996-10, pp. : 1193-1196

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Abstract