Mechanisms of sputtered atoms energy spectra formation during ejection: Computer simulation study for two-component targets

Author： Samoilov V.N.   Korsakova O.S.   Tatur A.E.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.47, Iss.12, 1996-12, pp. : 1443-1451

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