Plasma polymerized hexamethyldisiloxane: Discharge and film studies

Author: Durrant S.F.   De Moraes M.A.B.   Mota R.P.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.47, Iss.2, 1996-02, pp. : 187-192

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Abstract