Improvement of the performance of the ionization gauge with energy filter for the measurement of an extremely high vacuum

Author: Akimichi H.   Tanaka T.   Takeuchi K.   Tuzi Y.   Takahashi N.   Arakawa I.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.47, Iss.6, 1996-06, pp. : 561-565

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract