Simulations and experimental study on decoupling of gas phase ions from ESD ions using an energy analyzer in the RGA

Author: Watanabe S.   Aono M.   Kato S.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.47, Iss.6, 1996-06, pp. : 587-590

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract