Author： Tsujikawa H. Maruoka S. Koeda M. Uryu S. Funaba K. Shibanuma K. Kakudate S. Kanamori N. Tada E. Ohkawa Y.
Publisher： Elsevier
ISSN： 0042-207X
Source： Vacuum, Vol.47, Iss.6, 1996-06, pp. : 639-646
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
By Arai K. Ninomiya A. Ishigohka T. Takano K. Nakajima H. Michael P. Vieira R. Martovetsky N. Sborchia C. Alekseev A. Takahashi Y. Kato T. Kaiho K. Tsuji H. Okuno K. Ando T. Isono T. Koizumi N. Hamada K. Kawano K. Nunoya Y. Matsui K. Nishijima G. Kubo H. Uno Y. Seki S. Tsutsumi F. Nakamura T. Wakabayashi H.
Cryogenics, Vol. 44, Iss. 1, 2004-01 ,pp. :
Access to resources
Recommend
Preliminary results of MCPHE by experimental studies
By Chang Y.-P. Yang B.-C. Hwang J.-W.
Experimental Thermal and Fluid Science, Vol. 16, Iss. 4, 1998-04 ,pp. :
Two-step-etching process of MoW gate metal on large TFT glass substrates
By Okajima K. Sato T. Dohi T. Shibata M.
Vacuum, Vol. 51, Iss. 4, 1998-12 ,pp. :
Optimization and thermal stability studies of Ignitor and ITER
Radiation Effects and Defects in Solids, Vol. 166, Iss. 10, 2011-10 ,pp. :