An approach to improve initial pump-down speed of turbomolecular pumps by water-repellent coating on the blades

Author: Iguchi M.   Sawada T.   Okamoto M.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.47, Iss.6, 1996-06, pp. : 811-814

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Abstract