Author: Von Seggern J. Philipps V. Wienhold P. Pospieszczyk A. Esser H.G. Winter J.
Publisher: Elsevier
ISSN: 0042-207X
Source: Vacuum, Vol.47, Iss.6, 1996-06, pp. : 935-938
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
On the influence of substrate temperature for cubic boron nitride growth
Thin Solid Films, Vol. 437, Iss. 1, 2003-08 ,pp. :