Author: Coad J.P. Skorodumov B.G. Ulanov V.G. Wu C.H.
Publisher: Elsevier
ISSN: 0042-207X
Source: Vacuum, Vol.47, Iss.6, 1996-06, pp. : 985-990
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Strain in thick epitaxial layers
Thin Solid Films, Vol. 254, Iss. 1, 1995-01 ,pp. :
Atomic Layer Deposited Protective Layers
Materials Science Forum, Vol. 2016, Iss. 879, 2017-02 ,pp. :