Silicon micromachining technique for fabricating high temperature superconducting microbolometers

Author： Barth R.   Siewert J.   Spangenberg B.   Jaekel C.   Kurz H.   Utz B.   Prusseit W.   Kinder H.   Wolf H.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.47, Iss.9, 1996-09, pp. : 1129-1132

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