Formation and properties of nitrided layers produced in pulsed plasma at a frequency between 10 and 60 kHz

Author： Wierzchon T. Hering M. Niedbala R. Rudnicki J.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.48, Iss.6, 1997-06, pp. : 499-502

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