Modified C-t technique for determining the generation lifetime profile in MeV He + implanted silicon

Author: Mohacsy T.   Khanh N.Q.   Adam M.   Gyulai J.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.50, Iss.3, 1998-07, pp. : 399-401

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Abstract