A controller for automated and normalized data recording-Applied to measurement of line shape of spectral emission during ion beam sputtering

Author： Saha S.K. Bhattacharyya S.R. Ghose D.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.51, Iss.3, 1998-11, pp. : 457-461

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