Two-step-etching process of MoW gate metal on large TFT glass substrates

Author： Okajima K.   Sato T.   Dohi T.   Shibata M.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.51, Iss.4, 1998-12, pp. : 765-768

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