The outgassing from TiN and BN films grown on stainless steel by IBAD

Author： Chung K.H. Lee S.K. Shin Y.H. Lim J.Y. Hong S.S. Be S.H.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.53, Iss.1, 1999-05, pp. : 303-307

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