Comparison of in situ optical reflectance and post-growth characterisation for quantitative composition and thickness determination of Al x Ga 1-x As

Author： Jothilingam R. Farrell T. Joyce T.B. Bullough T.J. Goodhew P.J.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.53, Iss.1, 1999-05, pp. : 7-10

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