Non-destructive characterization of ion-implanted diamond

Author: Ma Z.Q.   Liu B.X.   Naramoto H.   Aoki Y.   Yamamoto S.   Takeshita H.   Goppelt-Langer P.C.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.55, Iss.3, 1999-12, pp. : 207-217

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Abstract