Phosphorus concentration profile in silicon produced by means of the nuclear reaction 30 Si(p, ) 31 P

Author： Garcia-Molina R.   Heredia-Avalos S.   Abril I.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.57, Iss.1, 2000-04, pp. : 81-85

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