Remote-coupled sensing of plasma harmonics and process end-point detection

Author： Law V.J.   Kenyon A.J.   Thornhill N.F.   Srigengan V.   Batty I.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.57, Iss.4, 2000-06, pp. : 351-364

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