Preparation and characterization of highly oriented Pb(Zr,Ti)O 3 thin films with seeding titanium layer deposited at low temperature by facing target sputtering

Author： Li X.-S.   Tanaka T.   Suzuki Y.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.59, Iss.2, 2000-11, pp. : 800-805

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