A surface cleaning method for sputter deposition of pure titanium film onto TiNi shape memory alloy substrate

Author: Sonoda T.   Watazu A.   Zhu J.   Kamiya A.   Ushiki K.   Naganuma K.   Kato M.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.60, Iss.1, 2001-01, pp. : 197-199

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Abstract