Study of the discharge gas trapping during thin-film growth

Author： Amorosi S.   Anderle M.   Benvenuti C.   Calatroni S.   Carver J.   Chiggiato P.   Neupert H.   Vollenberg W.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.60, Iss.1, 2001-01, pp. : 89-94

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