Gaseous precursors of diamond-like carbon films: chemical composition of CH 4 /Ar plasmas

Author： Riccardi C.   Barni R.   Sindoni E.   Fontanesi M.   Tosi P.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.61, Iss.2, 2001-05, pp. : 211-215

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