Influence of Xe + -ion irradiation on the microstructure of diamond-like carbon films

Author： Faizrakhmanov I.A.   Bazarov V.V.   Zhikharev V.A.   Stepanov A.L.   Khaibullin I.B.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.62, Iss.1, 2001-05, pp. : 15-19

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