Versatile microwave PECVD technique for deposition of DLC and other ordered carbon nanostructures

Author： Kumar S.   Rauthan C.M.S.   Dixit P.N.   Srivatsa K.M.K.   Khan M.Y.   Bhattacharyya R.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.63, Iss.3, 2001-08, pp. : 433-439

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