Synchrotron investigation of strain profiles in the implanted semiconductors

Author: Wierzchowski W.   Wieteska K.   Turos A.   Graeff W.   Gawlik G.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.63, Iss.4, 2001-08, pp. : 767-773

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Abstract