Diagnostics and modeling of glow discharges by time-resolved IR absorption spectroscopy

Author： Tanarro I. de los Arcos T. Domingo C. Herrero V.J. Sanz M.M.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.64, Iss.3, 2002-01, pp. : 457-465

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