Author: Takaki K. Fujimaki Y. Takada Y. Itagaki M. Fujiwara T. Ohshima S. Oyama K. Takahashi I. Kuwashima T.
Publisher: Elsevier
ISSN: 0042-207X
Source: Vacuum, Vol.65, Iss.3, 2002-05, pp. : 457-462
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Abstract
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