Properties of semiconductor surfaces covered with very thin insulating overlayers prepared by impacts of low-energy particles

Author: Pinck E.   Gleskova H.   Mullerova J.   Nadazdy V.   Mraz S.   Ortega L.   Jergel M.   Falcony C.   Brunner R.   Gmucova K.   Zeman M.   van Swaaij R.A.C.M.M.   KuCera M.   Jurani R.   Zahoran M.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.67, Iss.1, 2002-09, pp. : 131-141

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Abstract