Thermal and plasma nitridation of GaSe crystal

Author: Balitskii O.A.   Savchyn V.P.   Stakhira P.J.   Berchenko N.N.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.67, Iss.1, 2002-09, pp. : 69-73

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Abstract