Modification and mixing multi-layer systems by means of a high-power ion beam

Author: Pogrebnjak A.D.   Shantyr R.I.   Kul''ment''eva O.P.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.67, Iss.2, 2002-09, pp. : 243-248

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Abstract