Wave driven molecular discharges as sources of active species

Author： Ferreira C.M.   Tatarova E.   Dias F.M.   Guerra V.   Henriques J.   Pinheiro M.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.69, Iss.1, 2002-12, pp. : 183-187

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