Optical emission spectroscopy and Langmuir probe characterisation of the plasma during high-pressure sputter deposition of high-T c superconducting YBa 2 Cu 3 O 7-x thin films

Author： Tsaneva V.N.   Popov T.K.   Dias F.M.   Tarte E.J.   Blamire M.G.   Evetts J.E.   Barber Z.H.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.69, Iss.1, 2002-12, pp. : 261-266

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