Electron irradiation of a-Si:H films prepared from hydrogen-diluted silane

Author: Danesh P.   Pantchev B.   Savatinova I.   Liarokapis E.   Kaschieva S.   Belov A.G.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.69, Iss.1, 2002-12, pp. : 79-82

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Abstract