Conductivity of nanometer TiO 2 thin films by magnetron sputtering

Author: Gu G.-R.   He Z.   Tao Y.-c.   Li Y.-a.   Li J.-j.   Yin H.   Li W.-q.   Zhao Y.-n.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.70, Iss.1, 2003-02, pp. : 17-20

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Abstract