Influence of the substrate coating temperature on the vacuum properties of Ti-Zr-V non-evaporable getter films

Author： Benvenuti C.   Chiggiato P.   Pinto P.C.   Prodromides A.   Ruzinov V.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.71, Iss.1, 2003-05, pp. : 307-315

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