Computational study on the decomposition of tetraneopentyl zirconium for the chemical vapor deposition of zirconium carbide

Author： Won Yong

Publisher： Springer Publishing Company

ISSN： 0256-1115

Source： Korean Journal of Chemical Engineering, Vol.29, Iss.10, 2012-10, pp. : 1438-1443

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Chemical Vapor Deposition Precursors for High Dielectric Oxides: Zirconium and Hafnium Oxide

By Walawalkar Mrinalini Kottantharayil Anil Rao V. Ramgopal

Synthesis and Reactivity in Inorganic, Metal-Organic, and Nano-Metal Chemistry, Vol. 39, Iss. 6, 2009-07 ,pp. : 331-340

Taylor & Francis Ltd

Access to resources Recommend Favorite

The thermal decomposition of zirconium oxyhydroxide

By Sato Taichi

Journal of Thermal Analysis and Calorimetry, Vol. 69, Iss. 1, 2002-07 ,pp. : 255-265

Springer Publishing Company

Access to resources Recommend Favorite

Hydrolytic decomposition of dichlorodifluoromethane on modified zirconium oxide surfaces

By Hess A. Kemnitz E.

Catalysis Letters, Vol. 49, Iss. 3-4, 1997-12 ,pp. : 199-205

Springer Publishing Company

Access to resources Recommend Favorite

Thermal Decomposition of Several Layered Zirconium Salts

By Szirtes L. Megyeri J. Riess L. Kuzmann E.

Journal of Thermal Analysis and Calorimetry, Vol. 63, Iss. 1, 2000-01 ,pp. : 117-123

Springer Publishing Company

Access to resources Recommend Favorite