Effects of adsorbed water and sample aging in air on the N level adhesion force between Si(100) and silicon nitride

Author： Patton S.T. Eapen K.C. Zabinski J.S.

Publisher： Elsevier

ISSN： 0301-679X

Source： Tribology International, Vol.34, Iss.7, 2001-07, pp. : 481-491

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