In situ IR spectral study of the reaction of a-Si:H:F films with dimethylaluminum hydride

Author: Wadayama T.   Maiwa Y.   Hatta A.  

Publisher: Elsevier

ISSN: 0924-2031

Source: Vibrational Spectroscopy, Vol.13, Iss.1, 1996-12, pp. : 107-112

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Abstract