Design and modelling of silicon MEMS accelerometer

By Hrairi Meftah   Baharom Badrul Hanafi Bin  

International Journal of Engineering Systems Modelling and Simulation, Vol. 5, Iss. 4, 2013-09 ,pp. : 181-187

Inderscience Publishers

Access to resources Recommend Favorite

A silicon test chip for the thermomechanical analysis of MEMS packagings

By Majcherek Soeren  

Microsystem Technologies, Vol. 15, Iss. 1, 2009-01 ,pp. : 191-200

Springer Publishing Company

Access to resources Recommend Favorite

Design of a MEMS Gyroscope with Glass-Silicon-Glass Sandwich Structure

By  

Micro and Nanosystems, Vol. 3, Iss. 1, 2011-03 ,pp. : 26-34

Bentham Science Publishers

Access to resources Recommend Favorite

An on-chip micro-friction tester for tribology research of silicon based MEMS devices

By Guo Zhanshe   Meng Yonggang   Su Caijun   Wu Hao  

Microsystem Technologies, Vol. 14, Iss. 1, 2008-01 ,pp. : 109-118

Springer Publishing Company

Access to resources Recommend Favorite

Micro resonator for a tactile display

By Fukuda Toshio   Morita Hideyuki   Arai Fumihito   Ishihara Hidenori   Matsuura Hideo  

Advanced Robotics, Vol. 12, Iss. 2, 1997-01 ,pp. : 135-153

Taylor & Francis Ltd

Access to resources Recommend Favorite