Equivalent-circuit model for electrostatic micro-torsion mirror

Author: Matsuda Kazunori  

Publisher: Springer Publishing Company

ISSN: 1569-8025

Source: Journal of Computational Electronics, Vol.10, Iss.1-2, 2011-06, pp. : 136-140

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract