Electro-thermal Stimuli for MEMS Testing in FSBM Technology

Author: Dumas N.   Azaïs F.   Latorre L.   Nouet P.  

Publisher: Springer Publishing Company

ISSN: 0923-8174

Source: Journal of Electronic Testing, Vol.22, Iss.2, 2006-04, pp. : 189-198

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Abstract