Photolithography based on organosilane self-assembled monolayer resist

Author： Sugimura H.   Hanji T.   Takai O.   Masuda T.   Misawa H.  

Publisher： Elsevier

ISSN： 0013-4686

Source： Electrochimica Acta, Vol.47, Iss.1, 2001-09, pp. : 103-107

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