A study of the chemical breakdown of the anodic oxide formed on (100) oriented silicon in tetramethylammonium hydroxide (TMAH) solutions

Author： Miney P.G.   Cunnane V.J.  

Publisher： Elsevier

ISSN： 0013-4686

Source： Electrochimica Acta, Vol.48, Iss.11, 2003-05, pp. : 1475-1482

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