Electrochemical micromachining with ultrashort voltage pulses-a versatile method with lithographical precision

Author： Kock M.   Kirchner V.   Schuster R.  

Publisher： Elsevier

ISSN： 0013-4686

Source： Electrochimica Acta, Vol.48, Iss.20, 2003-09, pp. : 3213-3219

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