The molecular mechanism of novolak-diazonaphthoquinone resists

Author: Reiser A.   Huang J.P.   He X.   Yeh T.F.   Jha S.   Shih H.Y.   Kim M.S.   Han Y.K.   Yan K.  

Publisher: Elsevier

ISSN: 0014-3057

Source: European Polymer Journal, Vol.38, Iss.4, 2002-04, pp. : 619-629

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Abstract