Yttria-doped zirconia thin films deposited by atomic layer deposition ALD: a structural, morphological and electrical characterisation

Author： Bernay C.   Ringuede A.   Colomban P.   Lincot D.   Cassir M.  

Publisher： Elsevier

ISSN： 0022-3697

Source： Journal of Physics and Chemistry of Solids, Vol.64, Iss.9, 2003-09, pp. : 1761-1770

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