Very low gas flow measurements for UHV/XHV and leak calibration

Author: Detian Li   Yongjun Cheng   Yan Feng   Zhenhua Xi   Lan Zhao  

Publisher: IOP Publishing

ISSN: 0026-1394

Source: Metrologia, Vol.50, Iss.1, 2013-02, pp. : 15-19

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Abstract