Calibration of step heights and roughness measurements with atomic force microscopes

Author： Garnaes J.   Kofod N.   Kuhle A.   Nielsen C.   Dirscherl K.   Blunt L.  

Publisher： Elsevier

ISSN： 0141-6359

Source： Precision Engineering, Vol.27, Iss.1, 2003-01, pp. : 91-98

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