Measurement of thickness of a thin film by means of laser interference at many incident angles

Author： Ishikawa K.   Yamano H.   Kagawa K.-i.   Asada K.   Iwata K.   Ueda M.  

Publisher： Elsevier

ISSN： 0143-8166

Source： Optics and Lasers in Engineering, Vol.41, Iss.1, 2004-01, pp. : 19-29

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